Complete Au-free Metallization Platform for UWBG Al 0.65 Ga 0.35 N channel MOS-HEMTs using Ti/Al/Ti Ohmic Contacts and Refractory TiN/Pt Gates

arXiv:2610.40993 · physics.app-ph · Submitted 2026-10-29 · Read on arXiv

physics.app-ph

Submitted: 2026-10-29

Updated: 2026-10-29

Related papers