Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters

arXiv:2610.37130 · physics.optics, cond-mat.mtrl-sci, physics.ins-det · Submitted 2026-10-27 · Read on arXiv

physics.optics, cond-mat.mtrl-sci, physics.ins-det

Submitted: 2026-10-27

Updated: 2026-10-27

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