Comprehensive Acoustic Characterization of a Broadband Lateral MEMS Ultrasonic Transducer by Near-Field Acoustic Holography and Coupled Multiphysics Simulation

arXiv:2610.28868 · physics.app-ph · Submitted 2026-10-20 · Read on arXiv

physics.app-ph

Submitted: 2026-10-20

Updated: 2026-10-20

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