Micromagnet engineering for enhanced addressability of donor-cluster arrays in silicon

Phosphorus donors in silicon are one of the promising platforms for fault-tolerant quantum computing, owing to their long coherence times and compatibility with complementary metal-oxide-semiconductor (CMOS) technology. However, a key bottleneck for scaling this platform lies in the independent addressability of individual spin qubits. Here, we present a scalable quantum processor architecture that integrates scanning tunneling microscope (STM)-defined phosphorus donor-cluster arrays with on-chip micromagnets. By generating magnetic field gradients, the micromagnets enable a broader addressable frequency range compared to the addressing scheme based solely on variations in hyperfine (HF) interactions, which arise from the randomness of intra-cluster configurations. Through micromagnetic simulations to optimize micromagnet geometry, we demonstrate that these structures are compatible with customized array designs, facilitating the integration of over 120 atomic spin qubits and enabling frequency multiplexing with a single microwave antenna, which greatly reduces the overhead of fan-out addressing lines. This design is further validated via magnetic measurements, which generally align with our micromagnetic simulations. These results establish a critical foundation for the development of scalable silicon quantum computing with atomic qubits.