Kilovolt-class Vertical (011) -Ga2O3 Schottky Diodes for High Voltage and High Temperature Applications

We report kilovolt-class vertical (011) -Ga2O3 Schottky diodes utilizing high-permittivity dielectric TiO2/Al2O3 field-plate for high voltage and high temperature applications. A systematic study was performed with Pt/(011) -Ga2O3 Schottky barrier diodes (SBDs) with varied diameters from 100 μm to 300 μm, for both with and without field-plate, that revealed excellent consistency of reverse blocking performance regardless of diode area. The field-plate SBDs achieved superior breakdown voltages (3.90 - 4.16 kV) compared to the diodes without field-plate (3.06 - 3.16 kV) owing to effective edge termination. Furthermore, we explored high-temperature performance of the field-plate (011) -Ga2O3 diodes that revealed excellent forward conduction properties and high rectification ratio (10 9) throughout the temperature range (25 - 150 C). At reverse bias, the field-plate diodes also exhibited kV-range breakdown voltage with no evident increase in leakage current up to the explored elevated temperature of 150 C. The low area-dependence of breakdown voltage, excellent forward transport properties, and minimal reverse leakage at both high-voltage and elevated temperature demonstrate the exciting potential of (011) -Ga2O3 SBDs in high-temperature power switches. Thus, our work demonstrates the strategy of advancing the performance of vertical-Ga2O3 SBDs by utilizing the advantageous (011) -Ga2O3 epilayers with low background doping, reduced killer dislocation effects, and effective field management for high-voltage and high-temperature applications.