Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation

arXiv:2607.25330 · physics.optics, cs.AI, cs.LG, physics.app-ph · Submitted 2026-07-28 · Read on arXiv

physics.optics, cs.AI, cs.LG, physics.app-ph

Submitted: 2026-07-28

Updated: 2026-07-28

Comments: 17 pages, 7 figures

License: http://arxiv.org/licenses/nonexclusive-distrib/1.0/

Terminology

• Surrogate Model — 1× in this paper · explained in 2 episodes

Sources

• Physics-Informed Neural Operator for Learning Partial Differential Equations
• Pseudo-spectral frequency-domain method with background field decomposition and Green's function preconditioner for electromagnetic scattering problem in EUV lithography
• Factorized Fourier Neural Operators
• Fourier Neural Operator for Parametric Partial Differential Equations
• Geometry-Informed Neural Operator for Large-Scale 3D PDEs

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