High-Fidelity Synthetic Transmission Electron Microscopy Image Generation Using Diffusion Probabilistic Models for Data-Limited Semiconductor Metrology

arXiv:2606.24817 · cs.CV, eess.IV · Submitted 2026-06-23 · Read on arXiv

cs.CV, eess.IV

Submitted: 2026-06-23

Updated: 2026-10-22

Terminology

• Transmission Electron Microscopy — 2× in this paper
• Denoising Diffusion Probabilistic Model — 1× in this paper
• Fidelity — 1× in this paper · explained in 2 episodes
• Generative Model — 1× in this paper · explained in 2 episodes
• Generative Models — 1× in this paper · explained in 3 episodes
• Machine Learning (ML) — 1× in this paper · explained in 2 episodes
• Synthetic Data Generation — 1× in this paper · explained in 5 episodes

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