Integrating Active Damping with Shaping-Filtered Reset Tracking Control for Piezo-Actuated Nanopositioning
The paper addresses limitations in piezoelectric nanopositioning systems caused by structural resonances and linear control constraints. It proposes a dual-loop architecture using an inner non-minimumphase resonant controller for active damping, coupled with an outer tracking loop featuring a constant-gain, lead-in-phase reset element. A shaping filter is added to mitigate harmonic distortion from aggressive reset designs, resulting in significant improvements in bandwidth and error reduction.